INSULATOR STRUCTURES OBTAINED BY HIGH-DOSE NITROGEN IMPLANTATION INTO ALUMINUM ON SILICON
文献类型：期刊论文
| 作者 | LIN,CL ; HEMMENT,PLF ; NEJIM,A ; ZHANG,JP ; LI,JH ; Zou,SC(邹世昌） |
| 刊名 | NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
 |
| 出版日期 | 1993 |
| 卷号 | 74期号:1-2页码:206-209 |
| 关键词 | NITRIDE |
| ISSN号 | 0168-583X |
| 通讯作者 | LIN, CL, ACAD SINICA,SHANGHAI INST MET,ION BEAM LAB,SHANGHAI 200050,PEOPLES R CHINA |
| 学科主题 | Instruments & Instrumentation; Nuclear Science & Technology; Physics, Atomic, Molecular & Chemical; Physics, Nuclear |
| 收录类别 | SCI |
| 原文出处 | http://www.sciencedirect.com/science/article/pii/0168583X93950446 |
| 语种 | 英语 |
| 公开日期 | 2012-03-25 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/98487]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文（1999年以前) |
| 推荐引用方式 GB/T 7714 | LIN,CL,HEMMENT,PLF,NEJIM,A,et al. INSULATOR STRUCTURES OBTAINED BY HIGH-DOSE NITROGEN IMPLANTATION INTO ALUMINUM ON SILICON[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,1993,74(1-2):206-209. |
| APA | LIN,CL,HEMMENT,PLF,NEJIM,A,ZHANG,JP,LI,JH,&Zou,SC.(1993).INSULATOR STRUCTURES OBTAINED BY HIGH-DOSE NITROGEN IMPLANTATION INTO ALUMINUM ON SILICON.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,74(1-2),206-209. |
| MLA | LIN,CL,et al."INSULATOR STRUCTURES OBTAINED BY HIGH-DOSE NITROGEN IMPLANTATION INTO ALUMINUM ON SILICON".NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 74.1-2(1993):206-209. |
入库方式： OAI收割
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。