FORMATION OF ALUMINUM NITRIDE AND SEGREGATION OF CU IMPURITY ATOMS IN ALUMINUM IMPLANTED BY HIGH-DOSE NITROGEN-IONS
文献类型：期刊论文
| 作者 | LIN,CL ; HEMMENT,PLF ; LI,JH ; Zou,SC(邹世昌） |
| 刊名 | NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
 |
| 出版日期 | 1994 |
| 卷号 | 84期号:2页码:208-213 |
| ISSN号 | 0168-583X |
| 通讯作者 | LIN, CL, CHINESE ACAD SCI,SHANGHAI INST MET,STATE KEY LAB FUNCT MAT INFORMAT,SHANGHAI 200050,PEOPLES R CHINA |
| 学科主题 | Instruments & Instrumentation; Nuclear Science & Technology; Physics, Atomic, Molecular & Chemical; Physics, Nuclear |
| 收录类别 | SCI |
| 原文出处 | http://www.sciencedirect.com/science/article/pii/0168583X94957568 |
| 语种 | 英语 |
| 公开日期 | 2012-03-25 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/98565]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文（1999年以前) |
| 推荐引用方式 GB/T 7714 | LIN,CL,HEMMENT,PLF,LI,JH,et al. FORMATION OF ALUMINUM NITRIDE AND SEGREGATION OF CU IMPURITY ATOMS IN ALUMINUM IMPLANTED BY HIGH-DOSE NITROGEN-IONS[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,1994,84(2):208-213. |
| APA | LIN,CL,HEMMENT,PLF,LI,JH,&Zou,SC.(1994).FORMATION OF ALUMINUM NITRIDE AND SEGREGATION OF CU IMPURITY ATOMS IN ALUMINUM IMPLANTED BY HIGH-DOSE NITROGEN-IONS.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,84(2),208-213. |
| MLA | LIN,CL,et al."FORMATION OF ALUMINUM NITRIDE AND SEGREGATION OF CU IMPURITY ATOMS IN ALUMINUM IMPLANTED BY HIGH-DOSE NITROGEN-IONS".NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 84.2(1994):208-213. |
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