中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
FORMATION OF ALUMINUM NITRIDE AND SEGREGATION OF CU IMPURITY ATOMS IN ALUMINUM IMPLANTED BY HIGH-DOSE NITROGEN-IONS

文献类型:期刊论文

作者LIN,CL ; HEMMENT,PLF ; LI,JH ; Zou,SC(邹世昌)
刊名NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
出版日期1994
卷号84期号:2页码:208-213
ISSN号0168-583X
通讯作者LIN, CL, CHINESE ACAD SCI,SHANGHAI INST MET,STATE KEY LAB FUNCT MAT INFORMAT,SHANGHAI 200050,PEOPLES R CHINA
学科主题Instruments & Instrumentation; Nuclear Science & Technology; Physics, Atomic, Molecular & Chemical; Physics, Nuclear
收录类别SCI
原文出处http://www.sciencedirect.com/science/article/pii/0168583X94957568
语种英语
公开日期2012-03-25
源URL[http://ir.sim.ac.cn/handle/331004/98565]  
专题上海微系统与信息技术研究所_功能材料与器件_期刊论文(1999年以前)
推荐引用方式
GB/T 7714
LIN,CL,HEMMENT,PLF,LI,JH,et al. FORMATION OF ALUMINUM NITRIDE AND SEGREGATION OF CU IMPURITY ATOMS IN ALUMINUM IMPLANTED BY HIGH-DOSE NITROGEN-IONS[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,1994,84(2):208-213.
APA LIN,CL,HEMMENT,PLF,LI,JH,&Zou,SC.(1994).FORMATION OF ALUMINUM NITRIDE AND SEGREGATION OF CU IMPURITY ATOMS IN ALUMINUM IMPLANTED BY HIGH-DOSE NITROGEN-IONS.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,84(2),208-213.
MLA LIN,CL,et al."FORMATION OF ALUMINUM NITRIDE AND SEGREGATION OF CU IMPURITY ATOMS IN ALUMINUM IMPLANTED BY HIGH-DOSE NITROGEN-IONS".NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 84.2(1994):208-213.

入库方式: OAI收割

来源:上海微系统与信息技术研究所

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