DOPANTS DIFFUSION IN A THIN-FILM SIMOX STRUCTURE AND ITS COMPUTER-SIMULATION
文献类型：期刊论文
| 作者 | SHI, ZY ; LIN, CL ; ZHU, WH ; Zou, SC(邹世昌） ; HEMMENT, PLF |
| 刊名 | NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
 |
| 出版日期 | 1994 |
| 卷号 | 84期号:2页码:238-241 |
| ISSN号 | 0168-583X |
| 通讯作者 | SHI, ZY, CHINESE ACAD SCI,SHANGHAI INST MET,STATE KEY FUNCT MAT INFORMAT LAB,SHANGHAI 200050,PEOPLES R CHINA |
| 学科主题 | Instruments & Instrumentation; Nuclear Science & Technology; Physics, Atomic, Molecular & Chemical; Physics, Nuclear |
| 收录类别 | SCI |
| 原文出处 | http://www.sciencedirect.com/science/article/pii/0168583X94957622 |
| 语种 | 英语 |
| 公开日期 | 2012-03-25 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/98566]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文（1999年以前) |
| 推荐引用方式 GB/T 7714 | SHI, ZY,LIN, CL,ZHU, WH,et al. DOPANTS DIFFUSION IN A THIN-FILM SIMOX STRUCTURE AND ITS COMPUTER-SIMULATION[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,1994,84(2):238-241. |
| APA | SHI, ZY,LIN, CL,ZHU, WH,Zou, SC,&HEMMENT, PLF.(1994).DOPANTS DIFFUSION IN A THIN-FILM SIMOX STRUCTURE AND ITS COMPUTER-SIMULATION.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,84(2),238-241. |
| MLA | SHI, ZY,et al."DOPANTS DIFFUSION IN A THIN-FILM SIMOX STRUCTURE AND ITS COMPUTER-SIMULATION".NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 84.2(1994):238-241. |
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