FORMATION OF BURIED CARBON NITRIDE BY HIGH-DOSE NITROGEN IMPLANTATION INTO CARBON THIN-FILM
文献类型：期刊论文
| 作者 | XIN,HP ; LIN,CL ; ZHU,SY ; Zou,SC ; SHI,XH ; ZHU,H ; HEMMENT,PLF |
| 刊名 | NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
 |
| 出版日期 | 1995 |
| 卷号 | 103期号:3页码:309-312 |
| 关键词 | STRUCTURAL-PROPERTIES SILICON-NITRIDE ION-BEAMS SURFACES N+ |
| ISSN号 | 0168-583X |
| 通讯作者 | XIN, HP, CHINESE ACAD SCI,SHANGHAI INST MET,NATL LAB FUNCT MAT INFORMAT,SHANGHAI 200050,PEOPLES R CHINA |
| 学科主题 | Instruments & Instrumentation; Nuclear Science & Technology; Physics ; Atomic ; Molecular & Chemical; Physics ; Nuclear |
| 收录类别 | SCI |
| 公开日期 | 2012-03-25 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/98621]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文（1999年以前) |
| 推荐引用方式 GB/T 7714 | XIN,HP,LIN,CL,ZHU,SY,et al. FORMATION OF BURIED CARBON NITRIDE BY HIGH-DOSE NITROGEN IMPLANTATION INTO CARBON THIN-FILM[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,1995,103(3):309-312. |
| APA | XIN,HP.,LIN,CL.,ZHU,SY.,Zou,SC.,SHI,XH.,...&HEMMENT,PLF.(1995).FORMATION OF BURIED CARBON NITRIDE BY HIGH-DOSE NITROGEN IMPLANTATION INTO CARBON THIN-FILM.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,103(3),309-312. |
| MLA | XIN,HP,et al."FORMATION OF BURIED CARBON NITRIDE BY HIGH-DOSE NITROGEN IMPLANTATION INTO CARBON THIN-FILM".NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 103.3(1995):309-312. |
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