FORMATION OF COVALENT SOLID CNX COMPOUNDS BY HIGH-DOSE NITROGEN IMPLANTATION INTO CARBON THIN-FILMS
文献类型：期刊论文
| 作者 | XIN,HP ; XU,WP ; SHI,XH ; ZHU,H ; LIN,CL ; Zou,SC |
| 刊名 | APPLIED PHYSICS LETTERS
 |
| 出版日期 | 1995 |
| 卷号 | 66期号:24页码:3290-3291 |
| 关键词 | STRUCTURAL-PROPERTIES SILICON-NITRIDE ION-BEAMS SURFACES N+ |
| ISSN号 | 0003-6951 |
| 通讯作者 | XIN, HP, CHINESE ACAD SCI,SHANGHAI INST MET,FUNCT MAT INFORMAT NATL LAB,SHANGHAI 200050,PEOPLES R CHINA |
| 学科主题 | Physics ; Applied |
| 收录类别 | SCI |
| 公开日期 | 2012-03-25 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/98653]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文（1999年以前) |
| 推荐引用方式 GB/T 7714 | XIN,HP,XU,WP,SHI,XH,et al. FORMATION OF COVALENT SOLID CNX COMPOUNDS BY HIGH-DOSE NITROGEN IMPLANTATION INTO CARBON THIN-FILMS[J]. APPLIED PHYSICS LETTERS,1995,66(24):3290-3291. |
| APA | XIN,HP,XU,WP,SHI,XH,ZHU,H,LIN,CL,&Zou,SC.(1995).FORMATION OF COVALENT SOLID CNX COMPOUNDS BY HIGH-DOSE NITROGEN IMPLANTATION INTO CARBON THIN-FILMS.APPLIED PHYSICS LETTERS,66(24),3290-3291. |
| MLA | XIN,HP,et al."FORMATION OF COVALENT SOLID CNX COMPOUNDS BY HIGH-DOSE NITROGEN IMPLANTATION INTO CARBON THIN-FILMS".APPLIED PHYSICS LETTERS 66.24(1995):3290-3291. |
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