Transmission electron microscopy and spectroscopic ellipsometry studies of damage layer induced by large tilt angle ion implantation
文献类型：期刊论文
| 作者 | He,ZP ; Cristiano,F ; Zhou,ZY ; Qian,YH ; Chen,LY ; Lin,CL ; Hemment,PLF ; Zou,SC |
| 刊名 | JOURNAL OF THE ELECTROCHEMICAL SOCIETY
 |
| 出版日期 | 1996 |
| 卷号 | 143期号:8页码:2636-2640 |
| 关键词 | P+-N |
| ISSN号 | 0013-4651 |
| 通讯作者 | He, ZP, CHINESE ACAD SCI,SHANGHAI INST MET,SHANGHAI 200050,PEOPLES R CHINA |
| 学科主题 | Electrochemistry; Materials Science ; Coatings & Films |
| 收录类别 | SCI |
| 公开日期 | 2012-03-25 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/98673]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文（1999年以前) |
| 推荐引用方式 GB/T 7714 | He,ZP,Cristiano,F,Zhou,ZY,et al. Transmission electron microscopy and spectroscopic ellipsometry studies of damage layer induced by large tilt angle ion implantation[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY,1996,143(8):2636-2640. |
| APA | He,ZP.,Cristiano,F.,Zhou,ZY.,Qian,YH.,Chen,LY.,...&Zou,SC.(1996).Transmission electron microscopy and spectroscopic ellipsometry studies of damage layer induced by large tilt angle ion implantation.JOURNAL OF THE ELECTROCHEMICAL SOCIETY,143(8),2636-2640. |
| MLA | He,ZP,et al."Transmission electron microscopy and spectroscopic ellipsometry studies of damage layer induced by large tilt angle ion implantation".JOURNAL OF THE ELECTROCHEMICAL SOCIETY 143.8(1996):2636-2640. |
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