Experimental studies of superhard materials carbon nitride CNx prepared by ion-beam synthesis method
文献类型：期刊论文
| 作者 | Xin,HP ; Lin,CL ; Xu,HP ; Zou,SC ; Shi,XH ; Wu,XL ; Zhu,H ; Hemment,PLF |
| 刊名 | SCIENCE IN CHINA SERIES E-TECHNOLOGICAL SCIENCES
 |
| 出版日期 | 1996 |
| 卷号 | 39期号:4页码:404-411 |
| ISSN号 | 1006-9321 |
| 关键词 | STRUCTURAL-PROPERTIES SILICON-NITRIDE FILMS IMPLANTATION N+ |
| 通讯作者 | Xin, HP, ACAD SINICA,SHANGHAI INST MET,NATL LAB FUNCT MAT INFORMAT,SHANGHAI 200050,PEOPLES R CHINA |
| 学科主题 | Engineering ; Multidisciplinary; Materials Science ; Multidisciplinary |
| 收录类别 | SCI |
| 公开日期 | 2012-03-25 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/98730]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文（1999年以前) |
| 推荐引用方式 GB/T 7714 | Xin,HP,Lin,CL,Xu,HP,et al. Experimental studies of superhard materials carbon nitride CNx prepared by ion-beam synthesis method[J]. SCIENCE IN CHINA SERIES E-TECHNOLOGICAL SCIENCES,1996,39(4):404-411. |
| APA | Xin,HP.,Lin,CL.,Xu,HP.,Zou,SC.,Shi,XH.,...&Hemment,PLF.(1996).Experimental studies of superhard materials carbon nitride CNx prepared by ion-beam synthesis method.SCIENCE IN CHINA SERIES E-TECHNOLOGICAL SCIENCES,39(4),404-411. |
| MLA | Xin,HP,et al."Experimental studies of superhard materials carbon nitride CNx prepared by ion-beam synthesis method".SCIENCE IN CHINA SERIES E-TECHNOLOGICAL SCIENCES 39.4(1996):404-411. |
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