Experimental studies of N+ implantation into CVD diamond thin films
文献类型：期刊论文
| 作者 | Xin,HP ; Lin,CL ; Wang,JX ; Zou,SC ; Shi,XH ; Lin,ZX ; Zhou,ZY ; Liu,ZG |
| 刊名 | SCIENCE IN CHINA SERIES E-TECHNOLOGICAL SCIENCES
 |
| 出版日期 | 1997 |
| 卷号 | 40期号:4页码:361-368 |
| ISSN号 | 1006-9321 |
| 关键词 | ION |
| 通讯作者 | Xin, HP, CHINESE ACAD SCI,SHANGHAI INST MET,NATL LAB FUNCT MAT INFORMAT,SHANGHAI 200050,PEOPLES R CHINA |
| 学科主题 | Engineering ; Multidisciplinary; Materials Science ; Multidisciplinary |
| 收录类别 | SCI |
| 原文出处 | http://www.springerlink.com/content/q0277183w8264146/ |
| 公开日期 | 2012-03-25 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/98796]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文（1999年以前) |
| 推荐引用方式 GB/T 7714 | Xin,HP,Lin,CL,Wang,JX,et al. Experimental studies of N+ implantation into CVD diamond thin films[J]. SCIENCE IN CHINA SERIES E-TECHNOLOGICAL SCIENCES,1997,40(4):361-368. |
| APA | Xin,HP.,Lin,CL.,Wang,JX.,Zou,SC.,Shi,XH.,...&Liu,ZG.(1997).Experimental studies of N+ implantation into CVD diamond thin films.SCIENCE IN CHINA SERIES E-TECHNOLOGICAL SCIENCES,40(4),361-368. |
| MLA | Xin,HP,et al."Experimental studies of N+ implantation into CVD diamond thin films".SCIENCE IN CHINA SERIES E-TECHNOLOGICAL SCIENCES 40.4(1997):361-368. |
入库方式： OAI收割
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