Synthesis of titanium dioxide films by ion beam enhanced deposition
文献类型：期刊论文
| 作者 | Zhang, F ; Zheng, ZH ; Liu, D ; Mao, YJ ; Chen, Y ; Zhou, ZY ; Yang, SQ ; Liu, XH |
| 刊名 | NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
 |
| 出版日期 | 1997 |
| 卷号 | 132期号:4页码:620-626 |
| 关键词 | THIN-FILMS ASSISTED DEPOSITION TIO2 FILMS TIN FILMS BEHAVIOR SURFACE |
| ISSN号 | 0168-583X |
| 通讯作者 | Zhang, F, Chinese Acad Sci, Shanghai Inst Met, Ion Beam Lab, 865 Changning Rd, Shanghai 200050, Peoples R China |
| 学科主题 | Instruments & Instrumentation; Nuclear Science & Technology; Physics, Atomic, Molecular & Chemical; Physics, Nuclear |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2012-03-25 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/98826]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文（1999年以前) |
| 推荐引用方式 GB/T 7714 | Zhang, F,Zheng, ZH,Liu, D,et al. Synthesis of titanium dioxide films by ion beam enhanced deposition[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,1997,132(4):620-626. |
| APA | Zhang, F.,Zheng, ZH.,Liu, D.,Mao, YJ.,Chen, Y.,...&Liu, XH.(1997).Synthesis of titanium dioxide films by ion beam enhanced deposition.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,132(4),620-626. |
| MLA | Zhang, F,et al."Synthesis of titanium dioxide films by ion beam enhanced deposition".NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 132.4(1997):620-626. |
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