Microstructure of titanium oxide films investigated by atomic force microscopy and transmission electron microscopy
文献类型：期刊论文
| 作者 | Zhang, F ; Liu, XH ; Jin, S ; Bender, H ; Lou, NZ ; Wilson, ZH |
| 刊名 | NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
 |
| 出版日期 | 1998 |
| 卷号 | 142期号:1-2页码:61-66 |
| 关键词 | ASSISTED DEPOSITION BEAM |
| ISSN号 | 0168-583X |
| 通讯作者 | Zhang, F, Chinese Acad Sci, Shanghai Inst Met, Ion Beam Lab, 865 Changning Rd, Shanghai 200050, Peoples R China |
| 学科主题 | Instruments & Instrumentation; Nuclear Science & Technology; Physics, Atomic, Molecular & Chemical; Physics, Nuclear |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2012-03-25 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/98903]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文（1999年以前) |
| 推荐引用方式 GB/T 7714 | Zhang, F,Liu, XH,Jin, S,et al. Microstructure of titanium oxide films investigated by atomic force microscopy and transmission electron microscopy[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,1998,142(1-2):61-66. |
| APA | Zhang, F,Liu, XH,Jin, S,Bender, H,Lou, NZ,&Wilson, ZH.(1998).Microstructure of titanium oxide films investigated by atomic force microscopy and transmission electron microscopy.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,142(1-2),61-66. |
| MLA | Zhang, F,et al."Microstructure of titanium oxide films investigated by atomic force microscopy and transmission electron microscopy".NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 142.1-2(1998):61-66. |
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