Gettering of Cu by He-induced cavities in SIMOX materials
文献类型：期刊论文
| 作者 | Zhang, M ; Wang, LW ; Gao, JX ; Lin, CL ; Hemment, PLF ; Gutjahr, K ; Gosele, U |
| 刊名 | NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
 |
| 出版日期 | 1998 |
| 卷号 | 134期号:3-4页码:360-364 |
| 关键词 | SILICON-OXIDES IMPLANTATION COPPER BREAKDOWN NICKEL |
| ISSN号 | 0168-583X |
| 通讯作者 | Zhang, M, Chinese Acad Sci, Shanghai Inst Met, State Key Lab Funct Mat Informat, 865 Chungning Rd, Shanghai 200050, Peoples R China |
| 学科主题 | Instruments & Instrumentation; Nuclear Science & Technology; Physics, Atomic, Molecular & Chemical; Physics, Nuclear |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2012-03-25 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/98995]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文（1999年以前) |
| 推荐引用方式 GB/T 7714 | Zhang, M,Wang, LW,Gao, JX,et al. Gettering of Cu by He-induced cavities in SIMOX materials[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,1998,134(3-4):360-364. |
| APA | Zhang, M.,Wang, LW.,Gao, JX.,Lin, CL.,Hemment, PLF.,...&Gosele, U.(1998).Gettering of Cu by He-induced cavities in SIMOX materials.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,134(3-4),360-364. |
| MLA | Zhang, M,et al."Gettering of Cu by He-induced cavities in SIMOX materials".NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 134.3-4(1998):360-364. |
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