Optical effects of alpha-SiCx : H films synthesized by reactive ion beam deposition
文献类型：期刊论文
| 作者 | Yu, YH ; Wong, SP ; Wilson, IH |
| 刊名 | MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY
 |
| 出版日期 | 1998 |
| 卷号 | 52期号:1页码:55-58 |
| 关键词 | AMORPHOUS-SILICON-CARBIDE CARBON ALLOYS MICROVOIDS |
| ISSN号 | 0921-5107 |
| 通讯作者 | Yu, YH, Chinese Acad Sci, Shanghai Inst Met, Ion Beam Lab, Shanghai 200050, Peoples R China |
| 学科主题 | Materials Science, Multidisciplinary; Physics, Condensed Matter |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2012-03-25 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/99004]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文（1999年以前) |
| 推荐引用方式 GB/T 7714 | Yu, YH,Wong, SP,Wilson, IH. Optical effects of alpha-SiCx : H films synthesized by reactive ion beam deposition[J]. MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY,1998,52(1):55-58. |
| APA | Yu, YH,Wong, SP,&Wilson, IH.(1998).Optical effects of alpha-SiCx : H films synthesized by reactive ion beam deposition.MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY,52(1),55-58. |
| MLA | Yu, YH,et al."Optical effects of alpha-SiCx : H films synthesized by reactive ion beam deposition".MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY 52.1(1998):55-58. |
入库方式： OAI收割
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