A study of optical characteristics of damage in oxygen-implanted 6H-SiC
文献类型：期刊论文
| 作者 | Wang,LW ; Huang,JP ; Lin,CL ; Zou,SC ; Zheng,YX ; Wang,XJ ; Huang,DM ; Zetterling,CM ; Ostling,M |
| 刊名 | JOURNAL OF MATERIALS SCIENCE LETTERS
 |
| 出版日期 | 1999 |
| 卷号 | 18期号:12页码:979-982 |
| 关键词 | ENHANCED THERMAL-OXIDATION SILICON-CARBIDE ION-IMPLANTATION THIN-FILMS AMORPHIZATION LAYERS |
| ISSN号 | 0261-8028 |
| 通讯作者 | Wang, LW, Acad Sinica, Shanghai Inst Met, State Key Lab Funct Mat Informat & Ion Beam Lab, Shanghai 200050, Peoples R China |
| 学科主题 | Materials Science ; Multidisciplinary |
| 收录类别 | SCI |
| 原文出处 | http://www.springerlink.com/content/r50864x03716p226/ |
| 公开日期 | 2012-03-25 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/99066]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文（1999年以前) |
| 推荐引用方式 GB/T 7714 | Wang,LW,Huang,JP,Lin,CL,et al. A study of optical characteristics of damage in oxygen-implanted 6H-SiC[J]. JOURNAL OF MATERIALS SCIENCE LETTERS,1999,18(12):979-982. |
| APA | Wang,LW.,Huang,JP.,Lin,CL.,Zou,SC.,Zheng,YX.,...&Ostling,M.(1999).A study of optical characteristics of damage in oxygen-implanted 6H-SiC.JOURNAL OF MATERIALS SCIENCE LETTERS,18(12),979-982. |
| MLA | Wang,LW,et al."A study of optical characteristics of damage in oxygen-implanted 6H-SiC".JOURNAL OF MATERIALS SCIENCE LETTERS 18.12(1999):979-982. |
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