Effect of annealing on SiC thin films prepared by pulsed laser deposition
文献类型：期刊论文
| 作者 | Huang, JP ; Wang, LW ; Wen, J ; Wang, YX ; Lin, CL ; Ostling, M |
| 刊名 | DIAMOND AND RELATED MATERIALS
 |
| 出版日期 | 1999 |
| 卷号 | 8期号:12页码:2099-2102 |
| 关键词 | CHEMICAL-VAPOR-DEPOSITION CUBIC SILICON-CARBIDE EPITAXIAL-GROWTH TEMPERATURE ABLATION DEVICES |
| ISSN号 | 0925-9635 |
| 通讯作者 | Huang, JP, Chinese Acad Sci, Shanghai Inst Met, State Key Lab Funct Mat Informat, Shanghai 200050, Peoples R China |
| 学科主题 | Materials Science, Multidisciplinary |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2012-03-25 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/99111]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文（1999年以前) |
| 推荐引用方式 GB/T 7714 | Huang, JP,Wang, LW,Wen, J,et al. Effect of annealing on SiC thin films prepared by pulsed laser deposition[J]. DIAMOND AND RELATED MATERIALS,1999,8(12):2099-2102. |
| APA | Huang, JP,Wang, LW,Wen, J,Wang, YX,Lin, CL,&Ostling, M.(1999).Effect of annealing on SiC thin films prepared by pulsed laser deposition.DIAMOND AND RELATED MATERIALS,8(12),2099-2102. |
| MLA | Huang, JP,et al."Effect of annealing on SiC thin films prepared by pulsed laser deposition".DIAMOND AND RELATED MATERIALS 8.12(1999):2099-2102. |
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