Characterization of anti-adhesive self-assembled monolayer for nanoimprint lithography
文献类型：期刊论文
| 作者 | Zhou, WM ; Zhang, J ; Liu, YB ; Li, XL ; Niu, XM ; Song, ZT ; Min, GQ ; Wan, YZ ; Shi, LY ; Feng, SL |
| 刊名 | APPLIED SURFACE SCIENCE
 |
| 出版日期 | 2008 |
| 卷号 | 255期号:5页码:2885-2889 |
| 关键词 | STAMPS POLYMERS SCALE FILMS |
| ISSN号 | 0169-4332 |
| 通讯作者 | Zhou, WM, SNPC, Lab Nanotechnol, 3-F 3 Bldg,245 Jiachuan Rd, Shanghai 200237, Peoples R China |
| 学科主题 | Chemistry, Physical; Materials Science, Coatings & Films; Physics, Applied; Physics, Condensed Matter |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2012-03-24 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/94982]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Zhou, WM,Zhang, J,Liu, YB,et al. Characterization of anti-adhesive self-assembled monolayer for nanoimprint lithography[J]. APPLIED SURFACE SCIENCE,2008,255(5):2885-2889. |
| APA | Zhou, WM.,Zhang, J.,Liu, YB.,Li, XL.,Niu, XM.,...&Feng, SL.(2008).Characterization of anti-adhesive self-assembled monolayer for nanoimprint lithography.APPLIED SURFACE SCIENCE,255(5),2885-2889. |
| MLA | Zhou, WM,et al."Characterization of anti-adhesive self-assembled monolayer for nanoimprint lithography".APPLIED SURFACE SCIENCE 255.5(2008):2885-2889. |
入库方式： OAI收割
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