Research on ion implantation effect on SIMOX material modification technique by X-ray photoelectron spectroscopy
文献类型：期刊论文
| 作者 | Zhanga, EX ; Zhang, ZX ; Chen, J ; Song, ZR ; Yang, H ; He, W ; Tian, H ; Wang, X |
| 刊名 | NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
 |
| 出版日期 | 2007 |
| 卷号 | 257页码:199-202 |
| 关键词 | BURIED OXIDES OXYGEN NITROGEN HARDNESS DEFECTS A-SIO2 |
| ISSN号 | 0168-583X |
| 通讯作者 | Zhanga, EX, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Funct Mat Informat, 865,Changning Rd, Shanghai 200050, Peoples R China |
| 学科主题 | Instruments & Instrumentation; Nuclear Science & Technology; Physics, Atomic, Molecular & Chemical; Physics, Nuclear |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2012-03-24 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/95045]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Zhanga, EX,Zhang, ZX,Chen, J,et al. Research on ion implantation effect on SIMOX material modification technique by X-ray photoelectron spectroscopy[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,2007,257:199-202. |
| APA | Zhanga, EX.,Zhang, ZX.,Chen, J.,Song, ZR.,Yang, H.,...&Wang, X.(2007).Research on ion implantation effect on SIMOX material modification technique by X-ray photoelectron spectroscopy.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,257,199-202. |
| MLA | Zhanga, EX,et al."Research on ion implantation effect on SIMOX material modification technique by X-ray photoelectron spectroscopy".NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 257(2007):199-202. |
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