中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Effect of chemicals on chemical mechanical polishing of glass substrates

文献类型:期刊论文

作者Wang, LY ; Zhang, KL ; Song, ZT ; Feng, SL
刊名CHINESE PHYSICS LETTERS
出版日期2007
卷号24期号:1页码:259-261
关键词ABRASIVES SURFACE
ISSN号0256-307X
通讯作者Zhang, KL, Chinese Acad Sci, Lab Nanotechnol, Res Ctr Funct Semicond Film Engn & Technol, Shanghai Inst Microsyst & Informat Technol, Shanghai 200050, Peoples R China
学科主题Physics, Multidisciplinary
收录类别SCI
语种英语
公开日期2012-03-24
源URL[http://ir.sim.ac.cn/handle/331004/95084]  
专题上海微系统与信息技术研究所_功能材料与器件_期刊论文
推荐引用方式
GB/T 7714
Wang, LY,Zhang, KL,Song, ZT,et al. Effect of chemicals on chemical mechanical polishing of glass substrates[J]. CHINESE PHYSICS LETTERS,2007,24(1):259-261.
APA Wang, LY,Zhang, KL,Song, ZT,&Feng, SL.(2007).Effect of chemicals on chemical mechanical polishing of glass substrates.CHINESE PHYSICS LETTERS,24(1),259-261.
MLA Wang, LY,et al."Effect of chemicals on chemical mechanical polishing of glass substrates".CHINESE PHYSICS LETTERS 24.1(2007):259-261.

入库方式: OAI收割

来源:上海微系统与信息技术研究所

浏览0
下载0
收藏0
其他版本

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。