Effect of chemicals on chemical mechanical polishing of glass substrates
文献类型：期刊论文
| 作者 | Wang, LY ; Zhang, KL ; Song, ZT ; Feng, SL |
| 刊名 | CHINESE PHYSICS LETTERS
 |
| 出版日期 | 2007 |
| 卷号 | 24期号:1页码:259-261 |
| 关键词 | ABRASIVES SURFACE |
| ISSN号 | 0256-307X |
| 通讯作者 | Zhang, KL, Chinese Acad Sci, Lab Nanotechnol, Res Ctr Funct Semicond Film Engn & Technol, Shanghai Inst Microsyst & Informat Technol, Shanghai 200050, Peoples R China |
| 学科主题 | Physics, Multidisciplinary |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2012-03-24 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/95084]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Wang, LY,Zhang, KL,Song, ZT,et al. Effect of chemicals on chemical mechanical polishing of glass substrates[J]. CHINESE PHYSICS LETTERS,2007,24(1):259-261. |
| APA | Wang, LY,Zhang, KL,Song, ZT,&Feng, SL.(2007).Effect of chemicals on chemical mechanical polishing of glass substrates.CHINESE PHYSICS LETTERS,24(1),259-261. |
| MLA | Wang, LY,et al."Effect of chemicals on chemical mechanical polishing of glass substrates".CHINESE PHYSICS LETTERS 24.1(2007):259-261. |
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