Ceria concentration effect on chemical mechanical polishing of optical glass
文献类型：期刊论文
| 作者 | Wang, LY ; Zhang, KL ; Song, ZT ; Feng, SL |
| 刊名 | APPLIED SURFACE SCIENCE
 |
| 出版日期 | 2007 |
| 卷号 | 253期号:11页码:4951-4954 |
| 关键词 | OXIDE FUEL-CELL TECHNOLOGIES ABRASIVES DEFECT |
| ISSN号 | 0169-4332 |
| 通讯作者 | Wang, LY, Chinese Acad Sci, Lab Nano Technol, Res Ctr Funct Semicond Film Engn & Technol, Shanghai Inst Microsyst & Informat Technol,Grad S, Shanghai, Peoples R China |
| 学科主题 | Chemistry, Physical; Materials Science, Coatings & Films; Physics, Applied; Physics, Condensed Matter |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2012-03-24 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/95099]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Wang, LY,Zhang, KL,Song, ZT,et al. Ceria concentration effect on chemical mechanical polishing of optical glass[J]. APPLIED SURFACE SCIENCE,2007,253(11):4951-4954. |
| APA | Wang, LY,Zhang, KL,Song, ZT,&Feng, SL.(2007).Ceria concentration effect on chemical mechanical polishing of optical glass.APPLIED SURFACE SCIENCE,253(11),4951-4954. |
| MLA | Wang, LY,et al."Ceria concentration effect on chemical mechanical polishing of optical glass".APPLIED SURFACE SCIENCE 253.11(2007):4951-4954. |
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