中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Ceria concentration effect on chemical mechanical polishing of optical glass

文献类型:期刊论文

作者Wang, LY ; Zhang, KL ; Song, ZT ; Feng, SL
刊名APPLIED SURFACE SCIENCE
出版日期2007
卷号253期号:11页码:4951-4954
关键词OXIDE FUEL-CELL TECHNOLOGIES ABRASIVES DEFECT
ISSN号0169-4332
通讯作者Wang, LY, Chinese Acad Sci, Lab Nano Technol, Res Ctr Funct Semicond Film Engn & Technol, Shanghai Inst Microsyst & Informat Technol,Grad S, Shanghai, Peoples R China
学科主题Chemistry, Physical; Materials Science, Coatings & Films; Physics, Applied; Physics, Condensed Matter
收录类别SCI
语种英语
公开日期2012-03-24
源URL[http://ir.sim.ac.cn/handle/331004/95099]  
专题上海微系统与信息技术研究所_功能材料与器件_期刊论文
推荐引用方式
GB/T 7714
Wang, LY,Zhang, KL,Song, ZT,et al. Ceria concentration effect on chemical mechanical polishing of optical glass[J]. APPLIED SURFACE SCIENCE,2007,253(11):4951-4954.
APA Wang, LY,Zhang, KL,Song, ZT,&Feng, SL.(2007).Ceria concentration effect on chemical mechanical polishing of optical glass.APPLIED SURFACE SCIENCE,253(11),4951-4954.
MLA Wang, LY,et al."Ceria concentration effect on chemical mechanical polishing of optical glass".APPLIED SURFACE SCIENCE 253.11(2007):4951-4954.

入库方式: OAI收割

来源:上海微系统与信息技术研究所

浏览0
下载0
收藏0
其他版本

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。