Ceria concentration effect on chemical mechanical polishing of optical glass
文献类型:期刊论文
作者 | Wang, LY ; Zhang, KL ; Song, ZT ; Feng, SL |
刊名 | APPLIED SURFACE SCIENCE
![]() |
出版日期 | 2007 |
卷号 | 253期号:11页码:4951-4954 |
关键词 | OXIDE FUEL-CELL TECHNOLOGIES ABRASIVES DEFECT |
ISSN号 | 0169-4332 |
通讯作者 | Wang, LY, Chinese Acad Sci, Lab Nano Technol, Res Ctr Funct Semicond Film Engn & Technol, Shanghai Inst Microsyst & Informat Technol,Grad S, Shanghai, Peoples R China |
学科主题 | Chemistry, Physical; Materials Science, Coatings & Films; Physics, Applied; Physics, Condensed Matter |
收录类别 | SCI |
语种 | 英语 |
公开日期 | 2012-03-24 |
源URL | [http://ir.sim.ac.cn/handle/331004/95099] ![]() |
专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
推荐引用方式 GB/T 7714 | Wang, LY,Zhang, KL,Song, ZT,et al. Ceria concentration effect on chemical mechanical polishing of optical glass[J]. APPLIED SURFACE SCIENCE,2007,253(11):4951-4954. |
APA | Wang, LY,Zhang, KL,Song, ZT,&Feng, SL.(2007).Ceria concentration effect on chemical mechanical polishing of optical glass.APPLIED SURFACE SCIENCE,253(11),4951-4954. |
MLA | Wang, LY,et al."Ceria concentration effect on chemical mechanical polishing of optical glass".APPLIED SURFACE SCIENCE 253.11(2007):4951-4954. |
入库方式: OAI收割
浏览0
下载0
收藏0
其他版本
除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。