Au-Au wafer bonding in vertical-structure GaN LED fabrication
文献类型:期刊论文
| 作者 | Ou, X ; Wang, X ; Chen, J ; Sun, JY ; Lnu, AM ; Wang, X |
| 刊名 | AD'07: Proceedings of Asia Display 2007, Vols 1 and 2
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| 出版日期 | 2007 |
| 页码 | 1638-1641 |
| 关键词 | LIGHT-EMITTING-DIODES P-TYPE GAN TEMPERATURE CONTACTS NM |
| 通讯作者 | Ou, X, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Funct Mat Informat, Shanghai 200050, Peoples R China |
| 学科主题 | Optics; Physics, Multidisciplinary; Physics, Condensed Matter |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2012-03-24 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/95112] ![]() |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Ou, X,Wang, X,Chen, J,et al. Au-Au wafer bonding in vertical-structure GaN LED fabrication[J]. AD'07: Proceedings of Asia Display 2007, Vols 1 and 2,2007:1638-1641. |
| APA | Ou, X,Wang, X,Chen, J,Sun, JY,Lnu, AM,&Wang, X.(2007).Au-Au wafer bonding in vertical-structure GaN LED fabrication.AD'07: Proceedings of Asia Display 2007, Vols 1 and 2,1638-1641. |
| MLA | Ou, X,et al."Au-Au wafer bonding in vertical-structure GaN LED fabrication".AD'07: Proceedings of Asia Display 2007, Vols 1 and 2 (2007):1638-1641. |
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