Material and device properties of ZnO-based film bulk acoustic resonator for mass sensing applications
文献类型：期刊论文
| 作者 | Yan, Z ; Song, ZT ; Liu, WL ; Ren, HX ; Gu, N ; Zhou, XY ; Zhang, L ; Wang, Y ; Feng, SL ; Lai, LH ; Chen, J |
| 刊名 | APPLIED SURFACE SCIENCE
 |
| 出版日期 | 2007 |
| 卷号 | 253期号:24页码:9372-9380 |
| 关键词 | QUARTZ-CRYSTAL MICROBALANCE THIN-FILMS TEMPERATURE SUBSTRATE DEPOSITION GROWTH SENSOR MODE |
| ISSN号 | 0169-4332 |
| 通讯作者 | Yan, Z, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Lab Nanotechnol, Shanghai 200050, Peoples R China |
| 学科主题 | Chemistry, Physical; Materials Science, Coatings & Films; Physics, Applied; Physics, Condensed Matter |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2012-03-24 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/95144]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Yan, Z,Song, ZT,Liu, WL,et al. Material and device properties of ZnO-based film bulk acoustic resonator for mass sensing applications[J]. APPLIED SURFACE SCIENCE,2007,253(24):9372-9380. |
| APA | Yan, Z.,Song, ZT.,Liu, WL.,Ren, HX.,Gu, N.,...&Chen, J.(2007).Material and device properties of ZnO-based film bulk acoustic resonator for mass sensing applications.APPLIED SURFACE SCIENCE,253(24),9372-9380. |
| MLA | Yan, Z,et al."Material and device properties of ZnO-based film bulk acoustic resonator for mass sensing applications".APPLIED SURFACE SCIENCE 253.24(2007):9372-9380. |
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