Damascene array structure of phase change memory fabricated with chemical mechanical polishing method
文献类型：期刊论文
| 作者 | Liu, QB ; Song, ZT ; Zhang, KL ; Wang, LY ; Feng, SL ; Chen, BM |
| 刊名 | CHINESE PHYSICS LETTERS
 |
| 出版日期 | 2006 |
| 卷号 | 23期号:8页码:2296-2298 |
| 关键词 | ION-BEAM METHOD CELL-ELEMENT |
| ISSN号 | 0256-307X |
| 通讯作者 | Liu, QB, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Lab Nanotechnol, Shanghai 200050, Peoples R China |
| 学科主题 | Physics, Multidisciplinary |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2012-03-24 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/95180]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Liu, QB,Song, ZT,Zhang, KL,et al. Damascene array structure of phase change memory fabricated with chemical mechanical polishing method[J]. CHINESE PHYSICS LETTERS,2006,23(8):2296-2298. |
| APA | Liu, QB,Song, ZT,Zhang, KL,Wang, LY,Feng, SL,&Chen, BM.(2006).Damascene array structure of phase change memory fabricated with chemical mechanical polishing method.CHINESE PHYSICS LETTERS,23(8),2296-2298. |
| MLA | Liu, QB,et al."Damascene array structure of phase change memory fabricated with chemical mechanical polishing method".CHINESE PHYSICS LETTERS 23.8(2006):2296-2298. |
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