Fabrication of silicon-on-SiO2/diamondlike-carbon dual insulator using ion cutting and mitigation of self-heating effects
文献类型：期刊论文
| 作者 | Di, ZF ; Chu, PK ; Zhu, M ; Fu, RKY ; Luo, SH ; Shao, L ; Nastasi, M ; Chen, P ; Alford, TL ; Mayer, JW ; Zhang, M ; Liu, WL ; Song, ZT ; Lin, CL |
| 刊名 | APPLIED PHYSICS LETTERS
 |
| 出版日期 | 2006 |
| 卷号 | 88期号:14页码:142108-142108 |
| 关键词 | SILICON-ON-DIAMOND IMPLANTATION TECHNOLOGY MOSFETS |
| ISSN号 | 0003-6951 |
| 通讯作者 | Chu, PK, City Univ Hong Kong, Dept Phys Mat Sci, Tat Chee Ave, Kowloon, Hong Kong, Peoples R China |
| 学科主题 | Physics, Applied |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2012-03-24 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/95225]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Di, ZF,Chu, PK,Zhu, M,et al. Fabrication of silicon-on-SiO2/diamondlike-carbon dual insulator using ion cutting and mitigation of self-heating effects[J]. APPLIED PHYSICS LETTERS,2006,88(14):142108-142108. |
| APA | Di, ZF.,Chu, PK.,Zhu, M.,Fu, RKY.,Luo, SH.,...&Lin, CL.(2006).Fabrication of silicon-on-SiO2/diamondlike-carbon dual insulator using ion cutting and mitigation of self-heating effects.APPLIED PHYSICS LETTERS,88(14),142108-142108. |
| MLA | Di, ZF,et al."Fabrication of silicon-on-SiO2/diamondlike-carbon dual insulator using ion cutting and mitigation of self-heating effects".APPLIED PHYSICS LETTERS 88.14(2006):142108-142108. |
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