Preparation of high-quality Hf-aluminate films by EB-PVD
文献类型：期刊论文
| 作者 | Cheng, XH ; Song, ZR ; Yu, YH |
| 刊名 | RARE METAL MATERIALS AND ENGINEERING
 |
| 出版日期 | 2006 |
| 卷号 | 35期号:8页码:1192-1194 |
| 关键词 | ATOMIC-LAYER DEPOSITION THERMAL-STABILITY GATE DIELECTRICS SI(100) (HFO2)(X)(AL2O3)(1-X) SI |
| ISSN号 | 1002-185X |
| 通讯作者 | Cheng, XH, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Shanghai 200050, Peoples R China |
| 学科主题 | Materials Science, Multidisciplinary; Metallurgy & Metallurgical Engineering |
| 收录类别 | SCI |
| 原文出处 | http://www.cnki.net/kcms/detail/detail.aspx?Quer20120228ID=1&CurRec=1&DbCode=CJFQ&dbname=CJFD0608&filename=COSE200608003&uid=WEEvREcwSlJHSldRa1FiOS9VZHNRK0lqdEJl201202283k4R1ZacDBLa3VWRXR6bVNIc2ZLMmF1VUZraHU3WS9iT0s4PQ== |
| 语种 | 英语 |
| 公开日期 | 2012-03-24 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/95233]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Cheng, XH,Song, ZR,Yu, YH. Preparation of high-quality Hf-aluminate films by EB-PVD[J]. RARE METAL MATERIALS AND ENGINEERING,2006,35(8):1192-1194. |
| APA | Cheng, XH,Song, ZR,&Yu, YH.(2006).Preparation of high-quality Hf-aluminate films by EB-PVD.RARE METAL MATERIALS AND ENGINEERING,35(8),1192-1194. |
| MLA | Cheng, XH,et al."Preparation of high-quality Hf-aluminate films by EB-PVD".RARE METAL MATERIALS AND ENGINEERING 35.8(2006):1192-1194. |
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