Thin-film piezoelectric unimorph actuator-based deformable mirror with a transferred silicon membrane
文献类型：期刊论文
| 作者 | Yang, EH ; Hishinuma, Y ; Cheng, HG ; Trolier-McKinstry, S ; Bloemhof, E ; Levine, BM |
| 刊名 | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
 |
| 出版日期 | 2006 |
| 卷号 | 15期号:5页码:1214-1225 |
| 关键词 | TERRESTRIAL-PLANET-FINDER |
| ISSN号 | 1057-7157 |
| 通讯作者 | Hishinuma, Y, Stevens Inst Technol, Hoboken, NJ 07030 USA |
| 学科主题 | Engineering, Electrical & Electronic; Engineering, Mechanical |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2012-03-24 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/95249]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Yang, EH,Hishinuma, Y,Cheng, HG,et al. Thin-film piezoelectric unimorph actuator-based deformable mirror with a transferred silicon membrane[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,2006,15(5):1214-1225. |
| APA | Yang, EH,Hishinuma, Y,Cheng, HG,Trolier-McKinstry, S,Bloemhof, E,&Levine, BM.(2006).Thin-film piezoelectric unimorph actuator-based deformable mirror with a transferred silicon membrane.JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,15(5),1214-1225. |
| MLA | Yang, EH,et al."Thin-film piezoelectric unimorph actuator-based deformable mirror with a transferred silicon membrane".JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 15.5(2006):1214-1225. |
入库方式： OAI收割
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。