Effects of non-parallel combs on reliable operation conditions of capacitive inertial sensor for step and shock signals
文献类型：期刊论文
| 作者 | Dong, LX ; Che, LF ; Sun, LG ; Wang, YL |
| 刊名 | SENSORS AND ACTUATORS A-PHYSICAL
 |
| 出版日期 | 2005 |
| 卷号 | 121期号:2页码:395-404 |
| 关键词 | ELECTROSTATIC FORCES ACCELEROMETER |
| ISSN号 | 0924-4247 |
| 通讯作者 | Dong, LX, Hangzhou Dianzi Univ, Inst Microelect CAD, Hangzhou 310018, Peoples R China |
| 学科主题 | Engineering, Electrical & Electronic; Instruments & Instrumentation |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2012-03-24 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/95253]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Dong, LX,Che, LF,Sun, LG,et al. Effects of non-parallel combs on reliable operation conditions of capacitive inertial sensor for step and shock signals[J]. SENSORS AND ACTUATORS A-PHYSICAL,2005,121(2):395-404. |
| APA | Dong, LX,Che, LF,Sun, LG,&Wang, YL.(2005).Effects of non-parallel combs on reliable operation conditions of capacitive inertial sensor for step and shock signals.SENSORS AND ACTUATORS A-PHYSICAL,121(2),395-404. |
| MLA | Dong, LX,et al."Effects of non-parallel combs on reliable operation conditions of capacitive inertial sensor for step and shock signals".SENSORS AND ACTUATORS A-PHYSICAL 121.2(2005):395-404. |
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