Effect of O-implantation on the structure and resistance of Ge2Sb2Te5 film
文献类型：期刊论文
| 作者 | Liu, B ; Song, ZT ; Zhang, T ; Feng, SL ; Chen, BM |
| 刊名 | APPLIED SURFACE SCIENCE
 |
| 出版日期 | 2005 |
| 卷号 | 242期号:1-2页码:62-69 |
| 关键词 | CHANGE OPTICAL DISKS PHASE-CHANGE THIN-FILMS RAMAN-SCATTERING MEMORY SB CRYSTALLIZATION OXYGEN |
| ISSN号 | 0169-4332 |
| 通讯作者 | Liu, B, Chinese Acad Sci, Shanghai Inst Micro Syst & Informat Technol, Res Ctr Funct Semicond Film Engn & Technol, Shanghai 200050, Peoples R China |
| 学科主题 | Chemistry, Physical; Materials Science, Coatings & Films; Physics, Applied; Physics, Condensed Matter |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2012-03-24 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/95282]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Liu, B,Song, ZT,Zhang, T,et al. Effect of O-implantation on the structure and resistance of Ge2Sb2Te5 film[J]. APPLIED SURFACE SCIENCE,2005,242(1-2):62-69. |
| APA | Liu, B,Song, ZT,Zhang, T,Feng, SL,&Chen, BM.(2005).Effect of O-implantation on the structure and resistance of Ge2Sb2Te5 film.APPLIED SURFACE SCIENCE,242(1-2),62-69. |
| MLA | Liu, B,et al."Effect of O-implantation on the structure and resistance of Ge2Sb2Te5 film".APPLIED SURFACE SCIENCE 242.1-2(2005):62-69. |
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