Formation of silicon-on-aluminum nitride using ion-cut and theoretical investigation of self-heating effects
文献类型：期刊论文
| 作者 | Zhu, M ; Liu, WL ; Song, ZT ; Fu, RKY ; Chu, PK ; Lin, CL |
| 刊名 | MATERIALS LETTERS
 |
| 出版日期 | 2005 |
| 卷号 | 59期号:4页码:510-513 |
| 关键词 | IMPLANTATION MOSFETS |
| ISSN号 | 0167-577X |
| 通讯作者 | Zhu, M, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Res Ctr Funct Semiconductor Film Engn & Technol, 865 Changning Rd, Shanghai 200050, Peoples R China |
| 学科主题 | Materials Science, Multidisciplinary; Physics, Applied |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2012-03-24 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/95284]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Zhu, M,Liu, WL,Song, ZT,et al. Formation of silicon-on-aluminum nitride using ion-cut and theoretical investigation of self-heating effects[J]. MATERIALS LETTERS,2005,59(4):510-513. |
| APA | Zhu, M,Liu, WL,Song, ZT,Fu, RKY,Chu, PK,&Lin, CL.(2005).Formation of silicon-on-aluminum nitride using ion-cut and theoretical investigation of self-heating effects.MATERIALS LETTERS,59(4),510-513. |
| MLA | Zhu, M,et al."Formation of silicon-on-aluminum nitride using ion-cut and theoretical investigation of self-heating effects".MATERIALS LETTERS 59.4(2005):510-513. |
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