AIN thin films fabricated by ultra-high vacuum electron-beam evaporation with ammonia for silicon-on-insulator application
文献类型：期刊论文
| 作者 | Zhu, M ; Chen, P ; Fu, RKY ; Liu, WL ; Lin, CL ; Chu, PK |
| 刊名 | APPLIED SURFACE SCIENCE
 |
| 出版日期 | 2005 |
| 卷号 | 239期号:3-4页码:327-334 |
| 关键词 | EPITAXIAL-GROWTH ALUMINUM NITRIDE SMART-CUT(R) PROCESS SI(111) DEPOSITION SAPPHIRE SI |
| ISSN号 | 0169-4332 |
| 通讯作者 | Chu, PK, City Univ Hong Kong, Dept Phys & Mat Sci, Tat Chee Ave, Kowloon, Hong Kong, Peoples R China |
| 学科主题 | Chemistry, Physical; Materials Science, Coatings & Films; Physics, Applied; Physics, Condensed Matter |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2012-03-24 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/95289]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Zhu, M,Chen, P,Fu, RKY,et al. AIN thin films fabricated by ultra-high vacuum electron-beam evaporation with ammonia for silicon-on-insulator application[J]. APPLIED SURFACE SCIENCE,2005,239(3-4):327-334. |
| APA | Zhu, M,Chen, P,Fu, RKY,Liu, WL,Lin, CL,&Chu, PK.(2005).AIN thin films fabricated by ultra-high vacuum electron-beam evaporation with ammonia for silicon-on-insulator application.APPLIED SURFACE SCIENCE,239(3-4),327-334. |
| MLA | Zhu, M,et al."AIN thin films fabricated by ultra-high vacuum electron-beam evaporation with ammonia for silicon-on-insulator application".APPLIED SURFACE SCIENCE 239.3-4(2005):327-334. |
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