Fabrication and characterization of ZnO-based film bulk acoustic resonator with a high working frequency
文献类型：期刊论文
| 作者 | Zhang, T ; Wang, Y ; Liu, WL ; Cheng, JG ; Song, ZT ; Feng, SL ; Chan-Wong, LWH ; Choy, CL |
| 刊名 | CHINESE PHYSICS LETTERS
 |
| 出版日期 | 2005 |
| 卷号 | 22期号:3页码:694-696 |
| 关键词 | DEVICES WAVE |
| ISSN号 | 0256-307X |
| 通讯作者 | Zhang, T, Hong Kong Polytech Univ, Dept Appl Phys, Hong Kong, Hong Kong, Peoples R China |
| 学科主题 | Physics, Multidisciplinary |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2012-03-24 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/95298]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Zhang, T,Wang, Y,Liu, WL,et al. Fabrication and characterization of ZnO-based film bulk acoustic resonator with a high working frequency[J]. CHINESE PHYSICS LETTERS,2005,22(3):694-696. |
| APA | Zhang, T.,Wang, Y.,Liu, WL.,Cheng, JG.,Song, ZT.,...&Choy, CL.(2005).Fabrication and characterization of ZnO-based film bulk acoustic resonator with a high working frequency.CHINESE PHYSICS LETTERS,22(3),694-696. |
| MLA | Zhang, T,et al."Fabrication and characterization of ZnO-based film bulk acoustic resonator with a high working frequency".CHINESE PHYSICS LETTERS 22.3(2005):694-696. |
入库方式： OAI收割
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。