BCl3/Ar ICP etching of GaSb and related materials for quaternary antimonide laser diodes
文献类型：期刊论文
| 作者 | Hong, T ; Zhang, YG(张永刚） ; Liu, TD ; Zheng, YL |
| 刊名 | JOURNAL OF THE ELECTROCHEMICAL SOCIETY
 |
| 出版日期 | 2005 |
| 卷号 | 152期号:5页码:G372-G374 |
| 关键词 | III-V-SEMICONDUCTORS ROOM-TEMPERATURE CHEMISTRIES ALGAAS INAS GAAS |
| ISSN号 | 0013-4651 |
| 通讯作者 | Hong, T, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Funct Mat & Informat, Shanghai 200050, Peoples R China |
| 学科主题 | Electrochemistry; Materials Science, Coatings & Films |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2012-03-24 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/95311]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Hong, T,Zhang, YG,Liu, TD,et al. BCl3/Ar ICP etching of GaSb and related materials for quaternary antimonide laser diodes[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY,2005,152(5):G372-G374. |
| APA | Hong, T,Zhang, YG,Liu, TD,&Zheng, YL.(2005).BCl3/Ar ICP etching of GaSb and related materials for quaternary antimonide laser diodes.JOURNAL OF THE ELECTROCHEMICAL SOCIETY,152(5),G372-G374. |
| MLA | Hong, T,et al."BCl3/Ar ICP etching of GaSb and related materials for quaternary antimonide laser diodes".JOURNAL OF THE ELECTROCHEMICAL SOCIETY 152.5(2005):G372-G374. |
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