Observations of interfaces in direct wafer-bonded InP-GaAs structures
文献类型：期刊论文
| 作者 | Lao, YF ; Wu, HZ ; Li, M |
| 刊名 | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
 |
| 出版日期 | 2005 |
| 卷号 | 23期号:6页码:2351-2356 |
| ISSN号 | 1071-1023 |
| 关键词 | FUSION LASERS INTEGRATION |
| 通讯作者 | Wu, HZ, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Funct Mat Informat, 865 Changning Rd, Shanghai 200050, Peoples R China |
| 学科主题 | Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Physics, Applied |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2012-03-24 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/95331]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Lao, YF,Wu, HZ,Li, M. Observations of interfaces in direct wafer-bonded InP-GaAs structures[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,2005,23(6):2351-2356. |
| APA | Lao, YF,Wu, HZ,&Li, M.(2005).Observations of interfaces in direct wafer-bonded InP-GaAs structures.JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,23(6),2351-2356. |
| MLA | Lao, YF,et al."Observations of interfaces in direct wafer-bonded InP-GaAs structures".JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 23.6(2005):2351-2356. |
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