Effects of bias voltage polarity on differential capacitive sensitive devices
文献类型：期刊论文
| 作者 | Che, LF ; Xiong, B ; Dong, LX ; Wang, YL |
| 刊名 | SENSORS AND ACTUATORS A-PHYSICAL
 |
| 出版日期 | 2004 |
| 卷号 | 112期号:2-3页码:253-261 |
| 关键词 | ELECTROSTATIC FORCES ACCELEROMETER SENSORS |
| ISSN号 | 0924-4247 |
| 通讯作者 | Che, LF, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, 865 Changning Rd, Shanghai 200050, Peoples R China |
| 学科主题 | Engineering, Electrical & Electronic; Instruments & Instrumentation |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2012-03-24 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/95365]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Che, LF,Xiong, B,Dong, LX,et al. Effects of bias voltage polarity on differential capacitive sensitive devices[J]. SENSORS AND ACTUATORS A-PHYSICAL,2004,112(2-3):253-261. |
| APA | Che, LF,Xiong, B,Dong, LX,&Wang, YL.(2004).Effects of bias voltage polarity on differential capacitive sensitive devices.SENSORS AND ACTUATORS A-PHYSICAL,112(2-3),253-261. |
| MLA | Che, LF,et al."Effects of bias voltage polarity on differential capacitive sensitive devices".SENSORS AND ACTUATORS A-PHYSICAL 112.2-3(2004):253-261. |
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