A study of silicon oxynitride film prepared by ion beam assisted deposition
文献类型：期刊论文
| 作者 | Wang,YJ ; Cheng,XL ; Lin,ZL ; Zhang,CS ; Xiao,HB ; Zhang,F ; Zou,SC |
| 刊名 | MATERIALS LETTERS
 |
| 出版日期 | 2004 |
| 卷号 | 58期号:17-18页码:2261-2265 |
| 关键词 | RAY PHOTOELECTRON-SPECTROSCOPY WAVE-GUIDE REFRACTIVE-INDEX ON-INSULATOR THIN-FILMS AUGER-SPECTROSCOPY INTEGRATED-OPTICS NITRIDE FILMS ELLIPSOMETRY LAYERS |
| ISSN号 | 0167-577X |
| 通讯作者 | Wang, YJ, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Ion Beam Lab, 865 Changning Rd, Shanghai 200050, Peoples R China |
| 学科主题 | Materials Science ; Multidisciplinary; Physics ; Applied |
| 收录类别 | SCI |
| 公开日期 | 2012-03-24 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/95367]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Wang,YJ,Cheng,XL,Lin,ZL,et al. A study of silicon oxynitride film prepared by ion beam assisted deposition[J]. MATERIALS LETTERS,2004,58(17-18):2261-2265. |
| APA | Wang,YJ.,Cheng,XL.,Lin,ZL.,Zhang,CS.,Xiao,HB.,...&Zou,SC.(2004).A study of silicon oxynitride film prepared by ion beam assisted deposition.MATERIALS LETTERS,58(17-18),2261-2265. |
| MLA | Wang,YJ,et al."A study of silicon oxynitride film prepared by ion beam assisted deposition".MATERIALS LETTERS 58.17-18(2004):2261-2265. |
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