Electrical properties and microstructure of buried oxide (BOX) of SIMOX studied by Conducting Atomic Force Microscopy (C-AFM)
文献类型：期刊论文
| 作者 | Song, ZR ; Chen, KW ; Yu, YH ; Luo, EZ ; Shen, DS |
| 刊名 | THIN SOLID FILMS
 |
| 出版日期 | 2004 |
| 卷号 | 459期号:1-2页码:58-62 |
| 关键词 | ON-INSULATOR TECHNOLOGY |
| ISSN号 | 0040-6090 |
| 通讯作者 | Yu, YH, Chinese Acad Sci, Ion Beam Lab, Shanghai Inst Microsyst & Informat Technol, 865 Changning Rd, Shanghai 200050, Peoples R China |
| 学科主题 | Materials Science, Multidisciplinary; Materials Science, Coatings & Films; Physics, Applied; Physics, Condensed Matter |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2012-03-24 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/95379]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Song, ZR,Chen, KW,Yu, YH,et al. Electrical properties and microstructure of buried oxide (BOX) of SIMOX studied by Conducting Atomic Force Microscopy (C-AFM)[J]. THIN SOLID FILMS,2004,459(1-2):58-62. |
| APA | Song, ZR,Chen, KW,Yu, YH,Luo, EZ,&Shen, DS.(2004).Electrical properties and microstructure of buried oxide (BOX) of SIMOX studied by Conducting Atomic Force Microscopy (C-AFM).THIN SOLID FILMS,459(1-2),58-62. |
| MLA | Song, ZR,et al."Electrical properties and microstructure of buried oxide (BOX) of SIMOX studied by Conducting Atomic Force Microscopy (C-AFM)".THIN SOLID FILMS 459.1-2(2004):58-62. |
入库方式： OAI收割
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。