Simulation and characterization on properties of AlN films for SOI application
文献类型：期刊论文
| 作者 | Song,ZR ; Yu,YH ; Zou,SC ; Zheng,ZH ; Shen,DS ; Luo,EZ ; Xie,Z ; Sundaravel,B ; Wong,SP ; Wilson,IH |
| 刊名 | THIN SOLID FILMS
 |
| 出版日期 | 2004 |
| 卷号 | 459期号:1-2页码:41-47 |
| 关键词 | THIN-FILMS DEPOSITION MOSFETS SILICON GROWTH |
| ISSN号 | 0040-6090 |
| 通讯作者 | Yu, YH, Chinese Acad Sci, Ion Beam Lab, Shanghai Inst Microsyst & Informat Technol, Shanghai 200050, Peoples R China |
| 学科主题 | Materials Science ; Multidisciplinary; Materials Science ; Coatings & Films; Physics ; Applied; Physics ; Condensed Matter |
| 收录类别 | SCI |
| 公开日期 | 2012-03-24 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/95389]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Song,ZR,Yu,YH,Zou,SC,et al. Simulation and characterization on properties of AlN films for SOI application[J]. THIN SOLID FILMS,2004,459(1-2):41-47. |
| APA | Song,ZR.,Yu,YH.,Zou,SC.,Zheng,ZH.,Shen,DS.,...&Wilson,IH.(2004).Simulation and characterization on properties of AlN films for SOI application.THIN SOLID FILMS,459(1-2),41-47. |
| MLA | Song,ZR,et al."Simulation and characterization on properties of AlN films for SOI application".THIN SOLID FILMS 459.1-2(2004):41-47. |
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