Microstructure investigation of BaxSr1-xTiO3 thin film grown on porous silicon substrate
文献类型:期刊论文
作者 | Liu, WL ; Xing, S ; Lian, J ; Wang, LM ; Song, ZT ; Lin, CL ; Xu, ZK ; Chu, PK |
刊名 | MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
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出版日期 | 2004 |
卷号 | 7期号:4-6页码:253-258 |
关键词 | EPITAXIAL LAYER TRANSFER SI HETEROEPITAXY |
ISSN号 | 1369-8001 |
通讯作者 | Liu, WL, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Funct Mat Informat, Shanghai 200050, Peoples R China |
学科主题 | Engineering, Electrical & Electronic; Materials Science, Multidisciplinary; Physics, Applied; Physics, Condensed Matter |
收录类别 | SCI |
语种 | 英语 |
公开日期 | 2012-03-24 |
源URL | [http://ir.sim.ac.cn/handle/331004/95429] ![]() |
专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
推荐引用方式 GB/T 7714 | Liu, WL,Xing, S,Lian, J,et al. Microstructure investigation of BaxSr1-xTiO3 thin film grown on porous silicon substrate[J]. MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING,2004,7(4-6):253-258. |
APA | Liu, WL.,Xing, S.,Lian, J.,Wang, LM.,Song, ZT.,...&Chu, PK.(2004).Microstructure investigation of BaxSr1-xTiO3 thin film grown on porous silicon substrate.MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING,7(4-6),253-258. |
MLA | Liu, WL,et al."Microstructure investigation of BaxSr1-xTiO3 thin film grown on porous silicon substrate".MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING 7.4-6(2004):253-258. |
入库方式: OAI收割
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