Effect of oxygen implantation on the characteristic of Ge2Sb2Te5 phase change film
文献类型:期刊论文
作者 | Liu, B ; Song, ZT ; Zhang, T ; Feng, SL ; Chen, B |
刊名 | FIFTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS
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出版日期 | 2004 |
卷号 | 5774页码:287-290 |
关键词 | CHANGE OPTICAL DISKS CHANGE MEMORY THIN-FILMS |
ISSN号 | 0277-786X |
通讯作者 | Liu, B, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Res Ctr Funct Semicond Film Engn & Technol, 865 Changning Rd, Shanghai 200050, Peoples R China |
学科主题 | Optics |
收录类别 | SCI |
语种 | 英语 |
公开日期 | 2012-03-24 |
源URL | [http://ir.sim.ac.cn/handle/331004/95437] ![]() |
专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
推荐引用方式 GB/T 7714 | Liu, B,Song, ZT,Zhang, T,et al. Effect of oxygen implantation on the characteristic of Ge2Sb2Te5 phase change film[J]. FIFTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS,2004,5774:287-290. |
APA | Liu, B,Song, ZT,Zhang, T,Feng, SL,&Chen, B.(2004).Effect of oxygen implantation on the characteristic of Ge2Sb2Te5 phase change film.FIFTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS,5774,287-290. |
MLA | Liu, B,et al."Effect of oxygen implantation on the characteristic of Ge2Sb2Te5 phase change film".FIFTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS 5774(2004):287-290. |
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