Effect of oxygen implantation on the characteristic of Ge2Sb2Te5 phase change film
文献类型：期刊论文
| 作者 | Liu, B ; Song, ZT ; Zhang, T ; Feng, SL ; Chen, B |
| 刊名 | FIFTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS
 |
| 出版日期 | 2004 |
| 卷号 | 5774页码:287-290 |
| 关键词 | CHANGE OPTICAL DISKS CHANGE MEMORY THIN-FILMS |
| ISSN号 | 0277-786X |
| 通讯作者 | Liu, B, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Res Ctr Funct Semicond Film Engn & Technol, 865 Changning Rd, Shanghai 200050, Peoples R China |
| 学科主题 | Optics |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2012-03-24 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/95437]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Liu, B,Song, ZT,Zhang, T,et al. Effect of oxygen implantation on the characteristic of Ge2Sb2Te5 phase change film[J]. FIFTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS,2004,5774:287-290. |
| APA | Liu, B,Song, ZT,Zhang, T,Feng, SL,&Chen, B.(2004).Effect of oxygen implantation on the characteristic of Ge2Sb2Te5 phase change film.FIFTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS,5774,287-290. |
| MLA | Liu, B,et al."Effect of oxygen implantation on the characteristic of Ge2Sb2Te5 phase change film".FIFTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS 5774(2004):287-290. |
入库方式： OAI收割
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。