中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Effect of oxygen implantation on the characteristic of Ge2Sb2Te5 phase change film

文献类型:期刊论文

作者Liu, B ; Song, ZT ; Zhang, T ; Feng, SL ; Chen, B
刊名FIFTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS
出版日期2004
卷号5774页码:287-290
关键词CHANGE OPTICAL DISKS CHANGE MEMORY THIN-FILMS
ISSN号0277-786X
通讯作者Liu, B, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Res Ctr Funct Semicond Film Engn & Technol, 865 Changning Rd, Shanghai 200050, Peoples R China
学科主题Optics
收录类别SCI
语种英语
公开日期2012-03-24
源URL[http://ir.sim.ac.cn/handle/331004/95437]  
专题上海微系统与信息技术研究所_功能材料与器件_期刊论文
推荐引用方式
GB/T 7714
Liu, B,Song, ZT,Zhang, T,et al. Effect of oxygen implantation on the characteristic of Ge2Sb2Te5 phase change film[J]. FIFTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS,2004,5774:287-290.
APA Liu, B,Song, ZT,Zhang, T,Feng, SL,&Chen, B.(2004).Effect of oxygen implantation on the characteristic of Ge2Sb2Te5 phase change film.FIFTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS,5774,287-290.
MLA Liu, B,et al."Effect of oxygen implantation on the characteristic of Ge2Sb2Te5 phase change film".FIFTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS 5774(2004):287-290.

入库方式: OAI收割

来源:上海微系统与信息技术研究所

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