Microwave characterization of (Pb,La)TiO3 thin films integrated on ZrO2/SiO2/Si wafers by sol-gel techniques
文献类型:期刊论文
作者 | Song, ZT ; Wang, Y ; Chan, HLW ; Choy, CL ; Feng, SL |
刊名 | APPLIED PHYSICS LETTERS
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出版日期 | 2004 |
卷号 | 85期号:20页码:4696-4698 |
关键词 | INTERDIGITAL CAPACITORS TEMPERATURE FATIGUE DEVICES SENSOR (PB |
ISSN号 | 0003-6951 |
通讯作者 | Song, ZT, Hong Kong Polytech Univ, Dept Appl Phys, Hong Kong, Hong Kong, Peoples R China |
学科主题 | Physics, Applied |
收录类别 | SCI |
语种 | 英语 |
公开日期 | 2012-03-24 |
源URL | [http://ir.sim.ac.cn/handle/331004/95462] ![]() |
专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
推荐引用方式 GB/T 7714 | Song, ZT,Wang, Y,Chan, HLW,et al. Microwave characterization of (Pb,La)TiO3 thin films integrated on ZrO2/SiO2/Si wafers by sol-gel techniques[J]. APPLIED PHYSICS LETTERS,2004,85(20):4696-4698. |
APA | Song, ZT,Wang, Y,Chan, HLW,Choy, CL,&Feng, SL.(2004).Microwave characterization of (Pb,La)TiO3 thin films integrated on ZrO2/SiO2/Si wafers by sol-gel techniques.APPLIED PHYSICS LETTERS,85(20),4696-4698. |
MLA | Song, ZT,et al."Microwave characterization of (Pb,La)TiO3 thin films integrated on ZrO2/SiO2/Si wafers by sol-gel techniques".APPLIED PHYSICS LETTERS 85.20(2004):4696-4698. |
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