Determination of sp(3)/sp(2) ratio in amorphous-carbon thin film synthesized by reactive filtered arc deposition
文献类型:期刊论文
作者 | Li,WJ ; Song,ZR ; Yu,YH ; Zou,SC ; Shen,DS |
刊名 | NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
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出版日期 | 2003 |
卷号 | 206期号:0页码:339-342 |
关键词 | DIAMOND-LIKE CARBON COMPRESSIVE-STRESS SPECTROSCOPY |
ISSN号 | 0168-583X |
通讯作者 | Li, WJ, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Ion Beam Lab, 865 Changning Rd, Shanghai 200050, Peoples R China |
学科主题 | Instruments & Instrumentation; Nuclear Science & Technology; Physics ; Atomic ; Molecular & Chemical; Physics ; Nuclear |
收录类别 | SCI |
公开日期 | 2012-03-24 |
源URL | [http://ir.sim.ac.cn/handle/331004/95487] ![]() |
专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
推荐引用方式 GB/T 7714 | Li,WJ,Song,ZR,Yu,YH,et al. Determination of sp(3)/sp(2) ratio in amorphous-carbon thin film synthesized by reactive filtered arc deposition[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,2003,206(0):339-342. |
APA | Li,WJ,Song,ZR,Yu,YH,Zou,SC,&Shen,DS.(2003).Determination of sp(3)/sp(2) ratio in amorphous-carbon thin film synthesized by reactive filtered arc deposition.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,206(0),339-342. |
MLA | Li,WJ,et al."Determination of sp(3)/sp(2) ratio in amorphous-carbon thin film synthesized by reactive filtered arc deposition".NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 206.0(2003):339-342. |
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