Study of single deeply corrugated diaphragms for high-sensitivity microphones
文献类型：期刊论文
| 作者 | Wang, WJ ; Lin, RM ; Li, X ; Guo, DG |
| 刊名 | JOURNAL OF MICROMECHANICS AND MICROENGINEERING
 |
| 出版日期 | 2003 |
| 卷号 | 13期号:2页码:184-189 |
| 关键词 | SILICON CONDENSER MICROPHONE FABRICATION STRESS DESIGN |
| ISSN号 | 0960-1317 |
| 通讯作者 | Wang, WJ, Nanyang Technol Univ, Sch Mech & Prod Engn, Ctr Mech Microsyst, 50 Nanyang Ave, Singapore 639798, Singapore |
| 学科主题 | Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Instruments & Instrumentation; Materials Science, Multidisciplinary; Mechanics |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2012-03-24 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/95489]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Wang, WJ,Lin, RM,Li, X,et al. Study of single deeply corrugated diaphragms for high-sensitivity microphones[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING,2003,13(2):184-189. |
| APA | Wang, WJ,Lin, RM,Li, X,&Guo, DG.(2003).Study of single deeply corrugated diaphragms for high-sensitivity microphones.JOURNAL OF MICROMECHANICS AND MICROENGINEERING,13(2),184-189. |
| MLA | Wang, WJ,et al."Study of single deeply corrugated diaphragms for high-sensitivity microphones".JOURNAL OF MICROMECHANICS AND MICROENGINEERING 13.2(2003):184-189. |
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