Fabrication and characterization of thick porous silicon layers for rf circuits
文献类型：期刊论文
| 作者 | You, SZ ; Long, YF ; Xu, YS ; Zhu, ZQ ; Shi, YL ; Lai, ZS ; Li, ZF ; Lu, W |
| 刊名 | SENSORS AND ACTUATORS A-PHYSICAL
 |
| 出版日期 | 2003 |
| 卷号 | 108期号:1-3页码:117-120 |
| 关键词 | PERFORMANCE |
| ISSN号 | 0924-4247 |
| 通讯作者 | You, SZ, E China Normal Univ, Dept Elect Engn, Shanghai 200062, Peoples R China |
| 学科主题 | Engineering, Electrical & Electronic; Instruments & Instrumentation |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2012-03-24 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/95521]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | You, SZ,Long, YF,Xu, YS,et al. Fabrication and characterization of thick porous silicon layers for rf circuits[J]. SENSORS AND ACTUATORS A-PHYSICAL,2003,108(1-3):117-120. |
| APA | You, SZ.,Long, YF.,Xu, YS.,Zhu, ZQ.,Shi, YL.,...&Lu, W.(2003).Fabrication and characterization of thick porous silicon layers for rf circuits.SENSORS AND ACTUATORS A-PHYSICAL,108(1-3),117-120. |
| MLA | You, SZ,et al."Fabrication and characterization of thick porous silicon layers for rf circuits".SENSORS AND ACTUATORS A-PHYSICAL 108.1-3(2003):117-120. |
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