High frequency capacitance-voltage characterization of Al2O3/ZrO2/Al2O3 in fully depleted silicon-on-insulator metal-oxide-semiconductor capacitors
文献类型：期刊论文
| 作者 | Zhang, NL ; Song, ZT ; Shen, QW ; Wu, YJ ; Liu, QB ; Lin, CL ; Duo, XZ ; Zheng, LR ; Ding, YF ; Zhu, ZQ |
| 刊名 | APPLIED PHYSICS LETTERS
 |
| 出版日期 | 2003 |
| 卷号 | 83期号:25页码:5238-5240 |
| 关键词 | ZRO2/SIO2/SI LAYERED STRUCTURE THERMAL-STABILITY MOS CAPACITORS FILM ZRO2 DIELECTRICS HFO2 |
| ISSN号 | 0003-6951 |
| 通讯作者 | Zhang, NL, CAS, Shanghai Inst Microsyst & Informat Technol, 865 Changning Rd, Shanghai 200050, Peoples R China |
| 学科主题 | Physics, Applied |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2012-03-24 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/95538]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Zhang, NL,Song, ZT,Shen, QW,et al. High frequency capacitance-voltage characterization of Al2O3/ZrO2/Al2O3 in fully depleted silicon-on-insulator metal-oxide-semiconductor capacitors[J]. APPLIED PHYSICS LETTERS,2003,83(25):5238-5240. |
| APA | Zhang, NL.,Song, ZT.,Shen, QW.,Wu, YJ.,Liu, QB.,...&Zhu, ZQ.(2003).High frequency capacitance-voltage characterization of Al2O3/ZrO2/Al2O3 in fully depleted silicon-on-insulator metal-oxide-semiconductor capacitors.APPLIED PHYSICS LETTERS,83(25),5238-5240. |
| MLA | Zhang, NL,et al."High frequency capacitance-voltage characterization of Al2O3/ZrO2/Al2O3 in fully depleted silicon-on-insulator metal-oxide-semiconductor capacitors".APPLIED PHYSICS LETTERS 83.25(2003):5238-5240. |
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