Characteristics and polarization-enhanced model of wurtzite aluminum nitride thin films synthesized on Si(100) substrates by pulsed laser deposition
文献类型：期刊论文
| 作者 | An, ZH ; Men, CL ; Yu, J ; Chu, PK ; Lin, CL |
| 刊名 | JOURNAL OF APPLIED PHYSICS
 |
| 出版日期 | 2003 |
| 卷号 | 94期号:3页码:1934-1940 |
| 关键词 | CHEMICAL-VAPOR-DEPOSITION EPITAXIAL-GROWTH ALN FILMS ROOM-TEMPERATURE A1N FILMS SAPPHIRE HETEROSTRUCTURES MORPHOLOGY ABLATION SI(111) |
| ISSN号 | 0021-8979 |
| 通讯作者 | Chu, PK, City Univ Hong Kong, Dept Phys & Mat Sci, Tat Chee Ave, Kowloon, Hong Kong, Peoples R China |
| 学科主题 | Physics, Applied |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2012-03-24 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/95552]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | An, ZH,Men, CL,Yu, J,et al. Characteristics and polarization-enhanced model of wurtzite aluminum nitride thin films synthesized on Si(100) substrates by pulsed laser deposition[J]. JOURNAL OF APPLIED PHYSICS,2003,94(3):1934-1940. |
| APA | An, ZH,Men, CL,Yu, J,Chu, PK,&Lin, CL.(2003).Characteristics and polarization-enhanced model of wurtzite aluminum nitride thin films synthesized on Si(100) substrates by pulsed laser deposition.JOURNAL OF APPLIED PHYSICS,94(3),1934-1940. |
| MLA | An, ZH,et al."Characteristics and polarization-enhanced model of wurtzite aluminum nitride thin films synthesized on Si(100) substrates by pulsed laser deposition".JOURNAL OF APPLIED PHYSICS 94.3(2003):1934-1940. |
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