Preferentially oriented and amorphous Ti, TiN and Ti/TiN diffusion barrier for Cu prepared by ion beam assisted deposition (IBAD)
文献类型：期刊论文
| 作者 | Chen, KW ; Yu, YH ; Mu, HC ; Luo, EZ ; Sundaravel, B ; Wong, SP ; Wilson, IH |
| 刊名 | SURFACE & COATINGS TECHNOLOGY
 |
| 出版日期 | 2002 |
| 卷号 | 151页码:434-439 |
| 关键词 | LAYERS |
| ISSN号 | 0257-8972 |
| 通讯作者 | Chen, KW, Chinese Acad Sci, Shanghai Inst Met, Ion Beam Lab, 865 Chang Ning Rd, Shanghai 200050, Peoples R China |
| 学科主题 | Materials Science, Coatings & Films; Physics, Applied |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2012-03-24 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/95607]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Chen, KW,Yu, YH,Mu, HC,et al. Preferentially oriented and amorphous Ti, TiN and Ti/TiN diffusion barrier for Cu prepared by ion beam assisted deposition (IBAD)[J]. SURFACE & COATINGS TECHNOLOGY,2002,151:434-439. |
| APA | Chen, KW.,Yu, YH.,Mu, HC.,Luo, EZ.,Sundaravel, B.,...&Wilson, IH.(2002).Preferentially oriented and amorphous Ti, TiN and Ti/TiN diffusion barrier for Cu prepared by ion beam assisted deposition (IBAD).SURFACE & COATINGS TECHNOLOGY,151,434-439. |
| MLA | Chen, KW,et al."Preferentially oriented and amorphous Ti, TiN and Ti/TiN diffusion barrier for Cu prepared by ion beam assisted deposition (IBAD)".SURFACE & COATINGS TECHNOLOGY 151(2002):434-439. |
入库方式： OAI收割
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。