Properties of ZnO : Al films on polyester produced by de magnetron reactive sputtering
文献类型:期刊论文
作者 | Chen, M ; Pei, ZL ; Wang, X ; Sun, C ; Wen, LS |
刊名 | MATERIALS LETTERS
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出版日期 | 2001 |
卷号 | 48期号:3-4页码:137-143 |
关键词 | THIN-FILMS OPTICAL-PROPERTIES OXIDE-FILMS ELECTRICAL-PROPERTIES RF TEMPERATURE ORIENTATION PARAMETERS DEPOSITION SUBSTRATE |
ISSN号 | 0167-577X |
通讯作者 | Chen, M, Chinese Acad Sci, Shanghai Inst Met, Ion Beam Lab, Shanghai 200050, Peoples R China |
学科主题 | Materials Science, Multidisciplinary; Physics, Applied |
收录类别 | SCI |
语种 | 英语 |
公开日期 | 2012-03-24 |
源URL | [http://ir.sim.ac.cn/handle/331004/95707] ![]() |
专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
推荐引用方式 GB/T 7714 | Chen, M,Pei, ZL,Wang, X,et al. Properties of ZnO : Al films on polyester produced by de magnetron reactive sputtering[J]. MATERIALS LETTERS,2001,48(3-4):137-143. |
APA | Chen, M,Pei, ZL,Wang, X,Sun, C,&Wen, LS.(2001).Properties of ZnO : Al films on polyester produced by de magnetron reactive sputtering.MATERIALS LETTERS,48(3-4),137-143. |
MLA | Chen, M,et al."Properties of ZnO : Al films on polyester produced by de magnetron reactive sputtering".MATERIALS LETTERS 48.3-4(2001):137-143. |
入库方式: OAI收割
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