Structural and optical properties of SiC films deposited on Si by DG magnetron sputtering
文献类型：期刊论文
| 作者 | Lei,YM ; Yu,YH ; Cheng,LL ; Lin,L ; Sundaraval,B ; Luo,EZ ; Lin,S ; Ren,CX ; Cheung,WY ; Wong,SP ; Xu,JB ; Zou,SC ; Wilson,IH |
| 刊名 | SILICON CARBIDE AND RELATED MATERIALS, ECSCRM2000
 |
| 出版日期 | 2001 |
| 卷号 | 353-356期号:0页码:191-194 |
| 关键词 | ALLOYS |
| ISSN号 | 0255-5476 |
| 通讯作者 | Lei, YM, Chinese Acad Sci, Shanghai Inst Met, Ion Beam Lab, 865 Changning Rd, Shanghai 200050, Peoples R China |
| 学科主题 | Materials Science ; Multidisciplinary |
| 收录类别 | SCI |
| 公开日期 | 2012-03-24 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/95709]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Lei,YM,Yu,YH,Cheng,LL,et al. Structural and optical properties of SiC films deposited on Si by DG magnetron sputtering[J]. SILICON CARBIDE AND RELATED MATERIALS, ECSCRM2000,2001,353-356(0):191-194. |
| APA | Lei,YM.,Yu,YH.,Cheng,LL.,Lin,L.,Sundaraval,B.,...&Wilson,IH.(2001).Structural and optical properties of SiC films deposited on Si by DG magnetron sputtering.SILICON CARBIDE AND RELATED MATERIALS, ECSCRM2000,353-356(0),191-194. |
| MLA | Lei,YM,et al."Structural and optical properties of SiC films deposited on Si by DG magnetron sputtering".SILICON CARBIDE AND RELATED MATERIALS, ECSCRM2000 353-356.0(2001):191-194. |
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