Preparation of SiC thin films by DC magnetron sputtering and their application in microsensors
文献类型：期刊论文
| 作者 | Yu,YH ; Song,R ; Zou,SC ; Wong,SP ; Wilson,IH |
| 刊名 | SOLID-STATE AND INTEGRATED-CIRCUIT TECHNOLOGY, VOLS 1 AND 2, PROCEEDINGS
 |
| 出版日期 | 2001 |
| 期号 | 0页码:1432-1437 |
| 关键词 | SILICON-CARBIDE MONOCRYSTALLINE DEPOSITION ALPHA |
| 通讯作者 | Yu, YH, Chinese Acad Sci, Shanghai Inst Met, Ion Beam Lab, Shanghai 200050, Peoples R China |
| 学科主题 | Engineering ; Electrical & Electronic; Materials Science ; Multidisciplinary; Physics ; Applied; Physics ; Condensed Matter |
| 收录类别 | SCI |
| 公开日期 | 2012-03-24 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/95724]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Yu,YH,Song,R,Zou,SC,et al. Preparation of SiC thin films by DC magnetron sputtering and their application in microsensors[J]. SOLID-STATE AND INTEGRATED-CIRCUIT TECHNOLOGY, VOLS 1 AND 2, PROCEEDINGS,2001(0):1432-1437. |
| APA | Yu,YH,Song,R,Zou,SC,Wong,SP,&Wilson,IH.(2001).Preparation of SiC thin films by DC magnetron sputtering and their application in microsensors.SOLID-STATE AND INTEGRATED-CIRCUIT TECHNOLOGY, VOLS 1 AND 2, PROCEEDINGS(0),1432-1437. |
| MLA | Yu,YH,et al."Preparation of SiC thin films by DC magnetron sputtering and their application in microsensors".SOLID-STATE AND INTEGRATED-CIRCUIT TECHNOLOGY, VOLS 1 AND 2, PROCEEDINGS .0(2001):1432-1437. |
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