Investigation of H+ and B+/H+ implantation in LiTaO3 single-crystals
文献类型：期刊论文
| 作者 | Wan, Q ; Wang, LW ; Liu, WL ; Zhang, M ; Lin, CL |
| 刊名 | NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
 |
| 出版日期 | 2001 |
| 卷号 | 184期号:4页码:531-535 |
| 关键词 | SILICON |
| ISSN号 | 0168-583X |
| 通讯作者 | Wan, Q, Chinese Acad Sci, Shanghai Inst Met, State Key Lab Funct Mat Informat, 865 Changning Rd, Shanghai 200050, Peoples R China |
| 学科主题 | Instruments & Instrumentation; Nuclear Science & Technology; Physics, Atomic, Molecular & Chemical; Physics, Nuclear |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2012-03-24 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/95734]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Wan, Q,Wang, LW,Liu, WL,et al. Investigation of H+ and B+/H+ implantation in LiTaO3 single-crystals[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,2001,184(4):531-535. |
| APA | Wan, Q,Wang, LW,Liu, WL,Zhang, M,&Lin, CL.(2001).Investigation of H+ and B+/H+ implantation in LiTaO3 single-crystals.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,184(4),531-535. |
| MLA | Wan, Q,et al."Investigation of H+ and B+/H+ implantation in LiTaO3 single-crystals".NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 184.4(2001):531-535. |
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