Compositional and morphological study of reactive ion beam deposited AlN thin films
文献类型：期刊论文
| 作者 | Cheng, LL ; Yu, YH ; Sundaravel, B ; Luo, EZ ; Lin, S ; Lei, YM ; Ren, CX ; Cheung, WY ; Wong, SP ; Xu, JB ; Wilson, IH |
| 刊名 | NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
 |
| 出版日期 | 2000 |
| 卷号 | 169页码:94-97 |
| ISSN号 | 0168-583X |
| 关键词 | AUGER-ELECTRON SPECTROSCOPY ALUMINUM NITRIDE GROWTH AIN |
| 通讯作者 | Cheng, LL, Chinese Acad Sci, Shanghai Inst Met, Ion Beam Lab, 865 Changning Rd, Shanghai 200050, Peoples R China |
| 学科主题 | Instruments & Instrumentation; Nuclear Science & Technology; Physics, Atomic, Molecular & Chemical; Physics, Nuclear |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2012-03-24 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/95771]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Cheng, LL,Yu, YH,Sundaravel, B,et al. Compositional and morphological study of reactive ion beam deposited AlN thin films[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,2000,169:94-97. |
| APA | Cheng, LL.,Yu, YH.,Sundaravel, B.,Luo, EZ.,Lin, S.,...&Wilson, IH.(2000).Compositional and morphological study of reactive ion beam deposited AlN thin films.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,169,94-97. |
| MLA | Cheng, LL,et al."Compositional and morphological study of reactive ion beam deposited AlN thin films".NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 169(2000):94-97. |
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