Structural and electrical characteristics of oxygen-implanted 6H-SiC
文献类型：期刊论文
| 作者 | Wang, LW ; Huang, JP ; Duo, XZ ; Song, ZT ; Lin, CL ; Zetterling, CM ; Ostling, M |
| 刊名 | NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
 |
| 出版日期 | 2000 |
| 卷号 | 169页码:1-5 |
| 关键词 | ENHANCED THERMAL-OXIDATION SILICON-CARBIDE ION-IMPLANTATION AMORPHIZATION LAYERS |
| ISSN号 | 0168-583X |
| 通讯作者 | Wang, LW, Chinese Acad Sci, Shanghai Inst Met, State Key Lab Funct Mat Informat, 865 Changing RD, Shanghai 200050, Peoples R China |
| 学科主题 | Instruments & Instrumentation; Nuclear Science & Technology; Physics, Atomic, Molecular & Chemical; Physics, Nuclear |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2012-03-24 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/95772]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Wang, LW,Huang, JP,Duo, XZ,et al. Structural and electrical characteristics of oxygen-implanted 6H-SiC[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,2000,169:1-5. |
| APA | Wang, LW.,Huang, JP.,Duo, XZ.,Song, ZT.,Lin, CL.,...&Ostling, M.(2000).Structural and electrical characteristics of oxygen-implanted 6H-SiC.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,169,1-5. |
| MLA | Wang, LW,et al."Structural and electrical characteristics of oxygen-implanted 6H-SiC".NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 169(2000):1-5. |
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